THE HEBREW UNIVERSITY CENTER FOR NANOSCIENCE AND NANOTECHNOLOGY

Plasma System


Manufacturer and model: Diener PICO UHP
  • The 5 litres laboratory system PICO with semi-automatic control is mainly used for:
  • Small scale production
  • Analysis (SEM, TEM)
  • Medical technology
  • Research and development
  • Archaeology
  • Semiconductor technology
  • Plastic technology

Technical Data:
Switchgear Cabinet: W 550 mm, H 330 mm, D 500 mm
Chamber: Ø 150 mm, L 320 mm
Chamber Volume: approx. 5 litres
Gas Supply: 2 gas channels through needle valve- O2 and N2
Generator: 40kHz/200 W, infinitely variable (optional: 13.56 MHz or 2.45 GHz)
Trays: 1 pc. tray
Control: semi-automatic control, process time by timer

For More Information:
http://www.plasma.de/en/plasmasystems/pico.html