THE HEBREW UNIVERSITY CENTER FOR NANOSCIENCE AND NANOTECHNOLOGY

Thin Film Deposition System (Vacuum Coater)


Manufacturer and model: VST TFDS-141E

KEY FEATURES
  • Cooling of samples down to -15C
  • Heating of samples up to 50C
  • E-beam deposition for six different materials (more on demand)
  • Thermal source for two different materials
  • Base pressure 4x10-8 torr
  • Rotating sample holder
  • Adjustable sample height
  • Automatic deposition controller, with a library of processes
For more information:
http://www.vacuumltd.com/thin-film-deposition/item.php?ln=en&item_id=61&main_id=28